A Digital Output Accelerometer Using MEMS-based Piezoelectric Accelerometer Connected to Parallel CMOS Circuit

A 1 mG lateral CMOS-MEMS accelerometer

This paper reports a lateral CMOS-MEMS accelerometer with a measured noise floor of 1mG/ and a dynamic range larger than 13G. The accelerometer is fully compatible with conventional CMOS processes enabling the integration of most of the conditioning circuits. It is fabricated in a three metal layer 0.5μm CMOS process followed by a two-step dry etch release. An improved curl matching technique i...

MEMS Accelerometer based Digital Pen Recognition using Neural Networks

Now days, the growth of miniaturization technologies in electronic circuits and components has greatly decreased the dimension and weight of consumer electronic products, such as smart phones and handheld computers, and thus made them more handy and convenient. Due to the rapid development of computer technology, human– computer interaction (HCI) techniques have become an indispensable componen...

A Paper-Based Piezoelectric Accelerometer

This paper presents the design and testing of a one-axis piezoelectric accelerometer made from cellulose paper and piezoelectric zinc oxide nanowires (ZnO NWs) hydrothermally grown on paper. The accelerometer adopts a cantilever-based configuration with two parallel cantilever beams attached with a paper proof mass. A piece of U-shaped, ZnO-NW-coated paper is attached on top of the parallel bea...

Design and Simulation of A CMOS-MEMS Accelerometer

LIS3DSH: 3-axis digital output accelerometer

Introduction This document is intended to provide information on the use of and application hints related to ST's LIS3DSH 3-axial digital accelerometer. The LIS3DSH is an ultra low-power high performance 3-axis linear accelerometer belonging to the " nano " family. It has dynamically user selectable full scales of ±2g/±4g/±6g/±8g/±16g and is capable of measuring accelerations with output data r...